Research on Abrasives in the Chemical Mechanical Polishing Process for Silicon Nitride Balls

查看全文 作　　者：YUAN Ju-long, Lü Bing-hai, LIN Xü, JI Shi-ming, ZHANG Li-bin (Mechanical and Electronic Engineering College, Zhejiang University of Technology, Hangzhou 310014, China) 出　　处：《厦门大学学报(自然科学版)》索引2002年第41卷第S1期,共2页 基　　金：ProjectsupportedbyZhejiangProvincialNaturalScienceFoundationofChina (5 0 1 0 97,5 0 1 0 96)andYoungScientistTrainingProjectofZhejiangProvincialNaturalScienceFoundationofChina 摘　　要：Silicon nitride (Si 3N 4) has been the main material for balls in ceramic ball bearings, for its lower density, high strength, high hardness, fine thermal stability and anticorrosive, and is widely used in various fields, such as high speed and high temperature areojet engines, precision machine tools and chemical engineer machines. Silicon nitride ceramics is a kind of brittle and hard material that is difficult to machining. In the traditional finishing process of silicon nitride balls, balls are lapped by expensive diamond abrasive. The machining is inefficiency and the cost is high, but also lots of pits, scratch subsurface micro crazes and dislocations will be caused on the surface of the balls, the performance of the ball bearings would be declined seriously. In these year, a kind of new technology known as chemical mechanical polishing is introduced in the ultraprecision machining process of ceramic balls. In this technology, abrasives such as ZrO 2, CeO 2 whose hardness is close to or lower than the work material (Si 3N 4) are used to polishing the balls. In special slurry, these abrasives can chemo-mechanically react with the work material and environment (air or water) to generate softer material (SiO 2). And the resultants will be removed easily at 0.1 nm level. So the surface defects can be minimized, very smooth surface (Ra=4 nm) and fine sphericity (0.15~0.25 μm ) can be obtained, and the machining efficiency is also improved. The action mechanism of the abrasives in the chemical mechanical polishing process in finishing of silicon nitride ball will be introduced in this paper. 关 键 词：silicon nitride ball chemical mechanical polishing ABRASIVES