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Microstructure evolution and mechanical properties of Ti-B-N coatings deposited by plasma-enhanced chemical vapor deposition

查看全文 作　　者：Jung Ho [1,2]SHIN;Kwang Soo [2]CHOI;Tie-gang [3]WANG;Kwang Ho [1,2]KIM;Roman [4]NOWAK 高影响力作者 机构地区：[1]National Core Research Center for Hybrid Materials Solution,Pusan National University;[2]School of Materials Science and Engineering,Pusan National University;[3]State Key Laboratory of Corrosion and Protection,Institute of Metal Research,Chinese Academy of Sciences;[4]School of Chemical Technology,Aalto University高影响力机构 出　　处：《中国有色金属学会会刊:英文版》索引2012年第22卷第S3期,共7页高影响力期刊 基　　金：funded by a grant from the National Core Research Center(NCRC)Program through the National Research Foundation of Korea funded by the Ministry of Education,Science and Technology(No.2012-0000-957);by a grant from the Fundamental R&D Program for Core Technology of Materials funded by the Ministry of Knowledge Economy,Republic of Korea 摘　　要：Ternary Ti-B-N coatings were synthesized on AISI 304 and Si wafer by plasma-enhanced chemical vapor deposition (PECVD) technique using a gaseous mixture of TiCl4,BCl3,H2,N2,and Ar.By virtue of X-ray diffraction analysis,X-ray photoelectron spectroscopy,scanning electron microscope,and high-resolution transmission electron microscope,the influences of B content on the microstructure and properties of Ti B N coatings were investigated systematically.The results indicated that the microstructure and mechanical properties of Ti-B-N coatings largely depend on the transformation from FCC-TiN phase to HCP-TiB2 phase.With increasing B content and decreasing N content in the coatings,the coating microstructure evolves gradually from FCC-TiN/a-BN to HCP-TiB2 /a-BN via FCC-TiN+HCP-TiB2/a-BN.The highest microhardness of about 34 GPa is achieved,which corresponds to the nanocomposite Ti-63%B-N (mole fraction) coating consisting of the HCP-TiB2 nano-crystallites and amorphous BN phase.The lowest friction-coefficient was observed for the nanocomposite Ti-41%B-N (mole fraction) coating consisting of the FCC-TiN nanocrystallites and amorphous BN 关 键 词：Ti-B-N COATING plasma-enhanced chemical vapor deposition (PECVD) NANOCOMPOSITE COATING hardness friction coefficient
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