EFFECTS OF SPUTTERING CONDITIONS OF Tb Fe Co MAGNETO OPTICAL FILM ON KERRR OTATION

查看全文 作　　者：X.Y.Zhang , Z.N.Liu , J.Yi and Z.W.Chen Dept.of Materials Eng.,Southwest Jiaotong University,Chengdu 610031 ,China 出　　处：《Acta Metallurgica Sinica(English Letters)》索引1999年第12卷第4期,共3页 摘　　要：In the practical magneto opticaldisk productionline,alloysputteringtargetisalwaysusedtosputter recording film , whileinlaid targetisrarely used .In ourlaboratory,a seriesof al loy targets forsputtering magneto- optical recording film were prepared and theeffect ofcomposition andsputtering parameterson magneto opticalpropertiesarestudied . Thesputter ing rateof Al,Siand Tb Fe Co( Mo) undertheconditionsof differentsputtering powerandN2 Argasflux weredetermined and baseontheresults,a variablecomposition andthickness of SiNcan beobtained by meansof regulating sputtering power and gasflux, kindsof Mosputtering filmsareobtained under differentsputtering power and gasflux, and Kerrloop lineofthese magneto opticalfilmsare measuredto acquiretheir propertiessuch as Kerrrota tion,then ,theeffectofsputteringtechnology on Kerrrotationisdiscussed . 关 键 词：MAGNETO OPTICAL DISK FILM MAGNETO OPTICAL material