A Simulator for Producing of High Flux Atomic Oxygen Beam by Using ECR Plasma Source

查看全文 作　　者：Shuwang DUO, Meishuan LI and Yaming ZHANGShenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China

出　　处：《Journal of Materials Science & Technology》索引2004年第20卷第6期,共4页

基　　金：This work was supported by the National Key Basic Research and.Development Program of China(No.G19990650). 摘　　要：In order to study the atomic oxygen corrosion of spacecraft materials in low earth orbit environment, an atomic oxygen simulator was established. In the simulator, a 2.45 GHz microwave source with maximum power of 600 W was launched into the circular cavity to generate ECR (electron cyclotron resonance) plasma. The oxygen ion beam moved onto a negatively biased Mo plate under the condition of symmetry magnetic mirror field confine, then was neutralized and reflected to form oxygen atom beam. The properties of plasma density, electron temperature, plasma space potential and ion incident energy were characterized. The atomic oxygen beam flux was calibrated by measuring the mass loss rate of Kapton during the atomic 5~30 eV and a cross section of φ80 mm could be obtained under the operating pressure of 10-1~10-3 Pa. Such a high flux source can provide accelerated simulation tests of materials and coatings for space applications. 关键词：原子氧 ECR等离子体微波数值模拟高通量 LEO

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A Simulator for Producing of High Flux Atomic Oxygen Beam by Using ECR Plasma Source

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