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Detection of infrared photons with a superconductor

查看全文 作  者:ZHANG LaBao ZHONG YangYin KANG Lin CHEN Jian JI ZhengMing XU WeiWei CAO [1]ChunHai 高影响力作者 机构地区:[1]Research Institute of Superconductor Electronics (RISE), Department of Electronic Science & Engineering of Nanjing University,Nanjing 210093, China高影响力机构 出  处:《Chinese Science Bulletin》索引2009年第54卷第12期,共4页高影响力期刊 基  金:Supported by the National Basic Research Program of China(Grant Nos2006CB601006and2007CB310404);National High-tech R&D Program of China(Grant No.2006AA12Z120);National Natural Science Foundation of China(Grant No.60721063) 摘  要:A superconductor single photon detector based on NbN nanowire was fabricated using electron beam lithography (EBL) and reactive ion etching (RIE) for infrared photon detection. When biased well below its critical current at 4.2 K, NbN nanowire is very sensitive to the incident photons. Typical telecommunication photons with a wavelength of 1550 nm were detected by this detector. Data analysis indicates the repeating rate of the device with 200 nm NbN nanowire may be up to 100 MHz, and the quantum efficiency is about 0.01% when biased at 0.95Ic. 关 键 词:单光子探测器 超导体 红外 检测 反应离子刻蚀 电子束光刻 纳米线 NBN
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