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Comparison of electron transmittances and tunneling currents in an anisotropic TiN_x/HfO_2/SiO_2/p-Si(100) metal-oxide-semiconductor(MOS) capacitor calculated using exponential- and Airy-wavefunction approaches and a transfer matrix method

查看全文 作　　者：Fatimah [1]A.Noor;Mikrajuddin [1]Abdullah;[1]Sukirno;[1]Khairurrijal 高影响力作者 机构地区：[1]Physics of Electronic Materials Research Division,Faculty of Mathematics and Natural Sciences,Institut Teknologi Bandung,Jalan Ganesa 10,Bandung 40132,Indonesia高影响力机构 出　　处：《Journal of Semiconductors》索引2010年第31卷第12期,共5页高影响力期刊 摘　　要：Analytical expressions of electron transmittance and tunneling current in an anisotropic TiN_x/HfO_2/SiO_2/p-Si (100) metal-oxide-semiconductor(MOS) capacitor were derived by considering the coupling of transverse and longitudinal energies of an electron.Exponential and Airy wavefunctions were utilized to obtain the electron transmittance and the electron tunneling current.A transfer matrix method,as a numerical approach,was used as a benchmark to assess the analytical approaches.It was found that there is a similarity in the transmittances calculated among exponential- and Airy-wavefunction approaches and the TMM at low electron energies.However,for high energies,only the transmittance calculated by using the Airy-wavefunction approach is the same as that evaluated by the TMM.It was also found that only the tunneling currents calculated by using the Airy-wavefunction approach are the same as those obtained under the TMM for all range of oxide voltages.Therefore,a better analytical description for the tunneling phenomenon in the MOS capacitor is given by the Airy-wavefunction approach.Moreover,the tunneling current density decreases as the titanium concentration of the TiN_x metal gate increases because the electron effective mass of TiN_x decreases with increasing nitrogen concentration.In addition,the mass anisotropy cannot be neglected because the tunneling currents obtained under the isotropic and anisotropic masses are very different. 关 键 词：金属氧化物半导体 MOS电容 电子透射 转移矩阵法 各向异性 电容计算 波函数 指数和
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