Stressed carbon nanotube devices for high tunability,high quality factor, single mode GHz resonators

查看全文 作　　者：Xinhe [1,4,5]Wang;Dong [2]Zhu;Xinhe [1,5]Yang;Long [2]Yuan;Haiou [2]Li;Jiangtao [1,5]Wang;Mo [1]Chen;Guangwei [2]Deng;Wenjie [3]Liang;Qunqing [1,5]Li;Shoushan [1,5]Fan;Guoping [2]Guo;Kaili [1,5]Jiang

机构地区：[1]State Key Laboratory of Low-Dimensional Quantum Physics, Dept. of Physics and Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University, Beijing 100084, China;[2]Key Laboratory of Quantum Information, CAS, University of Science and Technology of China, Hefei230026, China;[3]Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China;[4]Fert Beijing Research Institute, School of Electrical and Information Engineering, BDBC, Beihang University, Beijing I O019 I, China;[5]Collaborative Innovation Center of Ouantum Matter, Beijing 100084, China

出　　处：《Nano Research》索引2018年第11卷第11期,共11页

基　　金：This work was supported by the National Basic Research Program of China (Nos. 2012CB932301 and 2014CB920904), the National Natural Science Foundation of China (Nos. 51727805, 11474178, and 11374342), the Beijing Advanced Innovation Center for Future Chips (ICFC), and the National Key R&D Program of China (No. 2017YFA0205800). D. Z., H. O. L., G. W. D. and G. P. G. were supported by the the National Key R&D Program of China (No. 2016YFA0301700), the National Natural Science Foundation of China (Nos. 11625419, 61704164 and 61674132), and the Anhui Initiative in Quantum Information Technologies (No. AHY080000). 摘　　要：The emerging applications of nanoelectromechanical systems (NEMS) inground-state cooling, quantum manipulation, communication devices, etc., callfor a nanoresonator with high frequency, quality factor, and tunability, as wellas easy integration. Here we show that such a nanoresonator can be achievedby using a unique assembly technique that transfers the stressed inner shell ofcarbon nanotubes (CNTs) to a self-aligned device geometry. The as-fabricatednanoresonator shows excellent comprehensive performance, i.e., high frequency(2-3 GHz), high tunability (80-110 MHz/V), high quality factor (3×10^4), andsingle mode operation. The defect-free nature of the inner shell of the CNTgives rise to a high quality factor, and the preloaded tension improves theresonant frequency and tunability. This resonator with excellent performancealso enables the integration of homogeneous devices and will play a key role inthe emerging applications of NEMS. 关键词：carbon NANOTUBE nanomechanical RESONATOR stress HIGH TUNABILITY HIGH frequency

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Stressed carbon nanotube devices for high tunability,high quality factor, single mode GHz resonators

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