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Review of gallium-oxide-based solar-blind ultraviolet photodetectors

查看全文 作  者:XUANHU [1]CHEN;FANGFANG [1]REN;SHULIN [1]GU;JIANDONG [1]YE 高影响力作者 机构地区:[1]School of Electronics Science and Engineering, Nanjing University高影响力机构 出  处:《Photonics Research》索引2019年第7卷第4期,共35页高影响力期刊 基  金:National Key Research and Development Project(2017YFB0403003,2018YFB0406502);National Natural Science Foundation of China(NSFC)(61322403,61774081);State Key Laboratory of Wide-Bandgap Semiconductor Power Electric Devices(2017KF001);Natural Science Foundation of Jiangsu Province(BK20161401);State Key R&D Project of Jiangsu(BE2018115);Fundamental Research Funds for the Central Universities(021014380085,021014380093);Postgraduate Research and Practice Innovation Program of Jiangsu Province 摘  要:Solar-blind photodetectors are of great interest to a wide range of industrial, civil, environmental, and biological applications. As one of the emerging ultrawide-bandgap semiconductors, gallium oxide(Ga_2O_3) exhibits unique advantages over other wide-bandgap semiconductors, especially in developing high-performance solar-blind photodetectors. This paper comprehensively reviews the latest progresses of solar-blind photodetectors based on Ga_2O_3 materials in various forms of bulk single crystal, epitaxial films, nanostructures, and their ternary alloys.The basic working principles of photodetectors and the fundamental properties and synthesis of Ga_2O_3, as well as device processing developments, have been briefly summarized. A special focus is to address the physical mechanism for commonly observed huge photoconductive gains. Benefitting from the rapid development in material epitaxy and device processes, Ga_2O_3-based solar-blind detectors represent to date one of the most prospective solutions for UV detection technology towards versatile applications. 关 键 词:Solar-blind photodetectors ultrawide-bandgap SEMICONDUCTORS wide-bandgap SEMICONDUCTORS
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