Transparent conductive oxide-gated silicon microring with extreme resonance wavelength tunability

查看全文 作　　者：ERWEN [1]LI;BEHZAD ASHRAFI [1]NIA;BOKUN [1]ZHOU;ALAN [1]X.WANG

机构地区：[1]School of Electrical Engineering and Computer Science, Oregon State University

出　　处：《Photonics Research》索引2019年第7卷第4期,共5页

基　　金：Air Force Office of Scientific Research(AFOSR)(FA9550-17-1-0071) 摘　　要：Transparent conductive oxides have attracted escalating research interest for integrated photonic devices and metasurfaces due to the extremely large electro-optic modulation of the refractive index by the free-carrier-induced plasma dispersion effect. In this paper, we have designed and fabricated a silicon microring resonator using an indium-tin oxide gate as the electric-tuning electrode. It achieved an ultralarge resonance wavelength tunability of 271 pm/V, which is obtained through the reduced width of the ring waveguide and a high-dielectric-constant Hf O2 insulator. We demonstrated a broad resonance wavelength tuning range of over 2 nm with an ultrafast response time of less than 12 ns and near-zero static power consumption, which outperforms traditional thermal tuning. 关键词：TRANSPARENT CONDUCTIVE attracted escalating refractive index

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Transparent conductive oxide-gated silicon microring with extreme resonance wavelength tunability

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