Biomimetic Corrugated Silicon Nanocone Arrays for Self-Cleaning Antireflection Coatings

查看全文 作　　者：Yandong [1]Wang;Nan [1]Lu;Hongbo [1]Xu;Gang [1]Shi;Miaojun [1]Xu;Xiaowen [2]Lin;Haibo [1]Li;Wentao [1]Wang;Dianpeng [1]Qi;Yanqing [2]Lu;Lifeng [1,3]Chi

机构地区：[1]State Key Laboratory of Supramolecular Structure and Materials,Jilin University,Changchun 130012,China;[2]National Laboratory of Solid State Microstructures,Nanjing University,Nanjing 210093,China;[3]Physikalisches Institut and Center for Nanotechnology(CeNTech),Westfälische Wilhelms-Universität,D-48149 Münster,Germany

出　　处：《Nano Research》索引2010年第3卷第7期,共8页

基　　金：This work was supported by the National Natural Science Foundation of China(No.20373019);the Program for New Century Excellent Talents in University,and the National Basic Research Program(Nos.2007CB808003 and 2009CB939701). 摘　　要：Corrugated silicon nanocone(SiNC)arrays have been fabricated on a silicon wafer by two polystyrene-sphere-monolayer-masked etching steps in order to create high-performance antireflective coatings.The reflectance was reduced from above 35%to less than 0.7%in the range 400-1050 nm,and it remained below 0.5%at incidence angles up to 70°at 632.8 nm for both s-and p-polarized light.The fluorinated corrugated SiNC array surface exhibits superhydrophobic properties with a water contact angle of 164°. 关键词：ANTIREFLECTION silicon nancone(SiNC)arrays reactive ion etching nanosphere lithography SUPERHYDROPHOBIC

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Biomimetic Corrugated Silicon Nanocone Arrays for Self-Cleaning Antireflection Coatings

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