Quantized structuring of transparent films with femtosecond laser interference

查看全文 作　　者：Kitty [1]Kumar;Kenneth KC [2]Lee;Jianzhao [2]Li;Jun [1]Nogami;Nazir P [1,2]Kherani;Peter R [2]Herman 机构地区：[1]Department of Materials Science and Engineering,University of Toronto,Toronto,Canada;[2]Department of Electrical and Computer Engineering,University of Toronto,Toronto,Canada 出　　处：《Light(Science & Applications)》索引2014年第3卷第1期,共7页 基　　金：This work was supported by the Natural Sciences and Engineering Research Council of Canada,the Ontario Research Fund-Research Excellence program and the University of Toronto. 摘　　要：The confinement of laser interactions inside transparent materials assisted by tight optical focusing and short-pulsed nonlinear interactions has driven many high-resolution patterning and probing applications in science and technology.In thin transparent films,laser interactions confined to the film/substrate interface have underpinned blistering and ejection processes for nanofluidic channel fabrication,film patterning and cell catapulting.Here,we harness femtosecond lasers to drive nonlinear interactions within Fabry–Perot interference fringes to define narrow nanolength scale zones for highly resolved internal structuring of a film of refractive index,nfilm,at fringe maxima separated by l/2nfilm.This novel interaction internally cleaves the film to open subwavelength internal cavities and form thin membranes at single or multiple depths from which follow significant opportunities for writing multilevel nanofluidic channels inside the film,as well as ejecting nanodisks at quantized film depths for coloring and three-dimensional surface patterning that promise new compact types of lab-in-film devices. 关 键 词：BLISTERING dielectrics laser processing quantized etching subwavelength processing thin filmsblistering dielectrics laser processing quantized etching subwavelength processing thin films