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Design of freeform geometries in a MEMS accelerometer with a mechanical motion preamplifier based on a genetic algorithm

查看全文 作　　者：Chen [1,2,3]Wang;Xiaoxiao [4]Song;Weidong [1]Fang;Fang [5]Chen;Ioannis [6]Zeimpekis;Yuan [4]Wang;Aojie [3]Quan;Jian [1]Bai;Huafeng [4]Liu;Gerold [7]Schropfer;Chris [7]Welham;Michael [3]Kraft 高影响力作者 机构地区：[1]College of Optical Science and Engineering,Zhejiang University,Hangzhou 310027,P.R.China;[2]Department of Electrical Engineering and Computer Science,University of Liege,Liege B-4000,Belgium;[3]ESAT-MICAS,University of Leuven,Leuven 3001,Belgium;[4]PGMF and School of Physics,Huazhong University of Science and Technology,Wuhan 430074,P.R.China;[5]Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,P.R.China;[6]ORC,University of Southampton,Southampton SO171BJ,UK;[7]Coventor—A Lam Research Company,Villebon sur Yvette 91140,France高影响力机构 出　　处：《Microsystems & Nanoengineering》索引2020年第6卷第1期,共14页高影响力期刊 基　　金：This work was funded by the Science Challenge Project under Grant TZ2016006-0502-02;the Natural Science Foundation of Hubei Province under Grant 2019CFB108. 摘　　要：This paper describes a novel,semiautomated design methodology based on a genetic algorithm(GA)using freeform geometries for microelectromechanical systems(MEMS)devices.The proposed method can design MEMS devices comprising freeform geometries and optimize such MEMS devices to provide high sensitivity,large bandwidth,and large fabrication tolerances.The proposed method does not require much computation time or memory.The use of freeform geometries allows more degrees of freedom in the design process,improving the diversity and performance of MEMS devices.A MEMS accelerometer comprising a mechanical motion amplifier is presented to demonstrate the effectiveness of the design approach.Experimental results show an improvement in the product of sensitivity and bandwidth by 100%and a sensitivity improvement by 141%compared to the case of a device designed with conventional orthogonal shapes.Furthermore,excellent immunities to fabrication tolerance and parameter mismatch are achieved. 关 键 词：ACCELEROMETER algorithm MOTION
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