Controllable generation of large-scale highly regular gratings on Si films

查看全文 作　　者：Jiao [1,2]Geng;Xiaoguo [1,2]Fang;Lei [1,2]Zhang;Guangnan [1,2]Yao;Liye [1,2]Xu;Fengjiang [1,2]Liu;Weiwei [1,2]Tang;Liping [1,2]Shi;Min [1,2]Qiu

机构地区：[1]Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province,School of Engineering,Westlake University,18 Shilongshan Road,Hangzhou 310024,Zhejiang Province,China;[2]Institute of Advanced Technology,Westlake Institute for Advanced Study,18 Shilongshan Road,Hangzhou 310024,Zhejiang Province,China

出　　处：《Light(Advanced Manufacturing)》索引2021年第2卷第3期,共9页

基　　金：supported by the National Key Research and Development Program of China(2017YFA0205700);the National Natural Science Foundation of China(No.61927820,No.12004313,No.12004314);supported by the open project program of Wuhan National Laboratory for optoelectronics No.2020WNLOKF004;Zhejiang Provincial Natural Science Foundation of China under Grant No.Q21A040010. 摘　　要：The application of femtosecond laser-induced periodic surface texturing has significant potential in medicine,optics,tribology,and biology,among other areas.However,when irradiated by a large intense laser spot,the periodic structures usually exhibit an uncontrollable regularity,forming bifurcated patterns,thus limiting their widespread application.Irregularity originates from numerous independent branching seeds.The usual solution to this problem is to utilize the quasi-direct laser writing technique,that is,by limiting the laser beam size(diameter of<10 wavelengths)and scanning the beam or samples using 2D translation stages.Herein,we demonstrate an optical localization-induced nonlinear competition mechanism to solve this problem,which occurs at a fluence nearly one order of magnitude below the ablation threshold.Owing to the low intrinsic absorption of silicon and ultralow applied fluence,this mechanism ensures the self-selection of a single seed to initiate an array of bifurcated-free gratings under stationary irradiation with a large laser spot(diameter>100 wavelengths).Surprisingly,some unconventional complex patterns,such as radial,annular,and spiral gratings,can also be easily produced by structured light fields with unprecedented regularity.Their diameters reach up to>500μm.Moreover,we can artificially control the initial seeding structure to further improve the regularity of the gratings,defined by dispersion in the ripple orientation angle in their 2D Fourier transform.As a result,the regularity in our experiments produced by a large laser spot is even higher than that scanned by a tiny beam.Controllable and highly regular ripples are beneficial to the structural coloring effects because they arise from the light diffraction by subwavelength gratings. 关键词：REGULARITY LIMITING utilize

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Controllable generation of large-scale highly regular gratings on Si films

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