Electrically pumped optomechanical beam GaN-LED accelerometer based on the quantum-confined Stark effect

查看全文 作　　者：GANGYI [1]ZHU;XIN [1]JI;ZHENFU [2]ZHANG;XINGCAN [1]YAN;YING [1]YANG;FEIFEI [1]QIN;XIN [1]LI;JIAGUI [3]WU;XIAOJUAN [4]SUN;JUNBO [2]YANG;YONGJIN [1]WANG 机构地区：[1]GaN Optoelectronic Integration International Cooperation Joint Laboratory of Jiangsu Province,Nanjing University of Posts and Telecommunications,Nanjing 210003,China;[2]College of Arts&Science,National University of Defense Technology,Changsha 410003,China;[3]School of Physical Science and Technology,Southwest University,Chongqing 400715,China;[4]State Key Laboratory of Luminescence and Applications,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China 出　　处：《Photonics Research》索引2023年第11卷第9期,共9页 基　　金：National Natural Science Foundation of China(62204127);Postgraduate Research Practice Innovation Program of Jiangsu Province(SJCX21_0267);Research Start-up Fund(NY219147,NY220181);Natural Science Foundation of Jiangsu Province(BK20215093);Foundation of Jiangsu Provincial Double-Innovation Doctor Program(30644);China Postdoctoral Science Foundation(2018M630588,2020M671441);State Key Laboratory of Luminescence and Applications(SKLA-2021-04)。 摘　　要：Micro-nano optomechanical accelerometers are widely used in automobile,aerospace,and other industrial applications.Here,we fabricate mechanical sensing components based on an electrically pumped GaN light-emitting diode(LED)with a beam structure.The relationship between the blueshift of the electroluminescence(EL)spectra and the deformation of the GaN beam structure based on the quantum-confined Stark effect(QCSE)of the InGaN quantum well(QW)structure is studied by introducing an extra mass block.Under the equivalent acceleration condition,in addition to the elastic deformation of GaN-LED,a direct relationship exists between the LED’s spectral shift and the acceleration’s magnitude.The extra mass block(gravitational force:7.55×10^(-11)N)induced blueshift of the EL spectra is obtained and shows driven current dependency.A polymer sphere(PS;gravitational force:3.427×10^(-12)N)is placed at the center of the beam GaN-LED,and a blueshift of 0.061 nm is observed in the EL spectrum under the injection current of 0.5 mA.The maximum sensitivity of the acceleration is measured to be 0.02 m∕s^(2),and the maximum measurable acceleration is calculated to be 1.8×10^(6)m∕s^(2).It indicates the simultaneous realization of high sensitivity and a broad acceleration measurement range.This work is significant for several applications,including light force measurement and inertial navigation systems with high integration ability. 关 键 词：PUMPED BEAM ACCELERATION