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269篇 您的检索式：期刊名="Journal of Vacuum Science Technology B"

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	题名	作者	年代	出处	被引量
1	Modified Postannealing of the Ge Condensation Process for Better-strained Si Material and Devices 显示文摘	Liu X Y Ma X B Du X F	2010	Journal of Vacuum Science & Technology B : Microelectronics and Nanometer Structures2010，28，5：	1
2	Screen Printed Carbon Nanotube Field Emitter Array for Lighting Source Application显示文摘	Park JH Son GH Moon JS	2005	Journal of Vacuum Science & Technology B2005，23，2：	1
3	Carrier Densities in InAs/Ga(Al)Sb(As) Quantum Wells显示文摘	Munekata H Esaki L Chang LL	1987	Journal of Vacuum Science and Technology B1987，5，3：	1
4	Mechanisms of copper removal during chemical mechanical polishing 显示文摘	Steigerwald J M Murarka S P Gutmann R J	1995	Journal of Vacuum Science and Technology B1995，13，6：	1
5	Electrical measurements of the conduction band discontinuity of the abrupt Ge-GaAs (100) heterojunction显示文摘	Ballingall J M C Wood E C Eastman L F	1983	Journal of Vacuum Science & Technology B1983，1，3：	1
6	Low temperature crystallization of high permittivity Ta oxide using an Nb oxide thin film for metal/insulator/metal capacitors in dynamic random access memory applications 显示文摘	DONGJOON M SUNGHO P BUM-SEOK S CHOI S LEE N LEE J H	2005	Journal of Vacuum Science and Technology B2005，23，1：	1
7	Overlay performance of 180 nm ground rule generation X- ray lithography aligner 显示文摘	CHEN A C FLAMHOLZ A L RIPPSTEIN R	1997	Journal of Vacuum Science and Technology B1997，15，6：	1
8	Imprint lithography for integrated circuit fabrication 显示文摘	RESNICK D J DAUKSHER W J MANCINI D	2003	Journal of Vacuum Science & Technology B2003，21，6：	1
9	Sub-10 nm imprint lithography and applications显示文摘	Stephen Y Chou Peter R Krauss Zhang Wei	1997	Journal of Vacuum Science&Technology B1997，15，6：	1
10	Fabrication of large area subwavelength antireflection structures on Si using trilayer resist nanoimprint lithography and liftoff显示文摘	Yu Z Gao H Wu W	2003	Journal of Vacuum Science&Technology B2003，21，6：	1
11	Improvement of Emission Characteristics Uniformity of Carbon Nanotube Field Emission Display By Surface Treatment显示文摘	Shiroishi T Hosono A Sono A	2006	Journal of Vacuum Science & Technology B2006，24，2：	1
12	Sub-10 nn imprint lithography and applications显示文摘	Chou S Y Krauss P R Zhang W	1997	Journal of Vacuum Science&Technology B1997，15，6：	1
13	Surface-science aspects of vacuum microelectronics 显示文摘	Schwoebel P R Brodie I	1995	Journal of Vacuum Science and Technology B1995，13，4：	1
14	Novel scheme for the preparation of transmission electron microscopy specimens with a focused ion beam 显示文摘	OVERWIJK M VAN DEN HEUVEL F BULLE‐LIEUWMA C	1993	Journal of Vacuum Science & Technology B1993，11，6：	1
15	Implementation of an imprint damascene process for interconnect fabrication显示文摘	Gerard M Schmid Michael D Stewart Jeffrey Wetzel	2006	Journal of Vacuum Science&Technology B2006，24，3：	1
16	Synthesis and characterization of one- dimensional WO2 nanorods 显示文摘	Ma Y R Lin C hi Ye C L	2005	Journal of Vacuum Science and Technology B2005，23，5：	1
17	Nanobubbles on solid surface imaged by atomic force microscopy显示文摘	Lou S T Ouyang Z Q Zhang Y	2000	Journal of Vacuum Science and Technology B : Microelectronics and Nanometer Structures2000，18，5：	1
18	Advanced techniques for glancing angle deposition 显示文摘	K Robbie J C Sit M J Brett	1998	Journal of Vacuum Science & Technology B1998，16，：	1
19	Nanoimprint and nanocontact technologies using hydrogen silsesquioxane显示文摘	Ken-ichiro Nakamatsu Keiichiro Watanabe Katsuhiko Tone	2005	Journal of Vacuum Science&Technology B2005，23，2：	1
20	Nanofabrication of high aspect ratio 24nm X-ray zone plates for X-ray imaging applications 显示文摘	Feng Y Feser M Lyon A	2007	Journal of Vacuum Science ~ Technology B2007，25，6：	1

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