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		题名	作者	年代	出处	被引量
	1	Critical relative indentation depth in carbon based thin films显示文摘The thin film hardness estimation by nanoindentation is influenced by substrate beyond a critical relative indentation depth(CRID). In this study we developed a methodology to identify the CRID in amorphous carbon film. Three types of amorphous carbon film deposited on silicon have been studied. The nanoindentation tests were carried out applying a 0.1–10 mN load range on a Berkovich diamond tip, leading to penetration depth-to-film thickness ratios of 8–100%. The work regained during unloading(We) and the work performed during loading(Wt) was estimated for each indentation. The trend of unload-to-load ratio(We/Wt) data as a function of depth has been studied. We/Wtdepth profiles showed a sigmoid trend and the data were fitted by means of a Hill sigmoid equation. Using Hill sigmoid fit and a simple analytical method it is possible to estimate CRID of carbon based films.	Ruben Bartali Alessandro Vaccari Victor Micheli Gloria Gottardi Rajesh Pandiyan Amos Collini Paolo Lori Gianni Coser Nadhira Laidani	2014	Progress in Natural Science:Materials International2014，24，3：	0

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