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| 1 | Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers显示文摘MEMS-based micro speakers are attractive candidates as sound transducers for smart devices,particularly wearables and hearables.For such devices,high sound pressure levels,low harmonic distortion and low power consumption are required for industrial,consumer and medical applications.The ability to integrate with microelectronic circuitry,as well as scalable batch production to enable low unit costs,are the key factors benchmarking a technology.The Nanoscopic Electrostatic Drive based,novel micro speaker concept presented in this work essentially comprises inplane,electrostatic bending actuators,and uses the chip volume rather than the its surface for sound generation.We describe the principle,design,fabrication,and first characterization results.Various design options and governing equations are given and discussed.In a standard acoustical test setup(ear simulator),a MEMS micro speaker generated a sound pressure level of 69 dB at 500 Hz with a total harmonic distortion of 4.4%,thus proving the concept.Further potential on sound pressure as well as linearity improvement is outlined.We expect that the described methods can be used to enhance and design other MEMS devices and foster modeling and simulation approaches. | Bert Kaiser Sergiu Langa Lutz Ehrig Michael Stolz Hermann Schenk Holger Conrad Harald Schenk Klaus Schimmanz David Schuffenhauer | 2019 | Microsystems & Nanoengineering2019，5，1： | 2 |
| 2 | Biologic Width around one- and two-piece titanium implants显示文摘 | Hermann JS Buser D Schenk RK | 2001 | Clin Oral Implants Res2001，12，6： | 1 |
| 3 | Biologic width aroundone-and two-piece titanium implants 显示文摘 | Hermann JS Buser D Schenk PK | 2001 | Clin Oral ImplantsRes2001，12，： | 1 |
| 4 | Biologic width around one-and two-piece titanium implants显示文摘 | Hermann J S Buser D Schenk R K | 2001 | Clin Oral Implants Res2001，12，6： | 1 |
| 5 | Biologic width around one- and two-piece titanium implants显示文摘 | Hermann JS Buser D Schenk RK | 2001 | Clin Oral Implants Res2001，12，6： | 1 |
| 6 | Biologic width aroundone-and two-piece titanium implants 显示文摘 | Hermann JS Buser D Schenk PK | 2001 | Clin Oral ImplantsRes2001，12，： | 1 |
| 7 | Biologic width around one- and two- piece titanium implants显示文摘 | Hermann JS Buser D Schenk RK | 2001 | Clin Oral Implants Res2001，12，6： | 1 |
| 8 | Biologic Width a- round one and two-piece titanium implants显示文摘 | Hermann JS Buser D Schenk RK | 2001 | Clin Oral Implants Res2001，12，6： | 1 |
| 9 | Biologic Width around one-and two-piece titanium implants显示文摘 | Hermann JS Buser D Schenk RK | 2001 | Clin Oral Implants Res2001，12，6： | 1 |
| 10 | Biologic Width around one-and two-piece titanium implants显示文摘 | Hermann JS Buser D Schenk RK | | 0，，06： | 1 |
| 11 | Biologic Width around one- and two-piece titanium implants 显示文摘 | Hermann JS Buser D Schenk RK | 2001 | Clin Oral Implants Res2001，12，6： | 1 |
| 12 | Biologic Width around one- and two-piece titanium implants显示文摘 | Hermann JS Buser D Schenk RK | 2001 | Clin Oral Implants Res2001，12，6： | 1 |
| 13 | FITC-linked Fibrin-Binding Peptide and real-time live confocal microscopy as a novel tool to visualize fibrin(ogen)in coagulation显示文摘Background and Aim:Although fibrinogen has been established as a key player in the process of coagulation,many questions about the role of fibrinogen under specific conditions remain.Confocal microscopic assessment of clot formation,and in particular the role that fibrinogen plays in this process,is commonly investigated using pre-labeled fibrinogen.This has a number of drawbacks,primarily that it is impossible to stain fibrin networks after their formation.The aim of the present study is to present an alternative for conveniently post-staining fibrin in a wide range of models/situations,in real time and with high resolution.Methods:We combined a peptide known to bind fibrin and linked it to fluorescein isothiocyanate(FITC),creating the FITC-Fibrin-Binding Peptide(FFBP).We subsequently tested its fibrin-binding capability in vitro under static conditions,as well as under simulated flow,using real-time live confocal microscopy.Results:Fibrin stained with FFBP overlaps with fibrin stained with fibrinogen pre-labeled with Alexa Fluor 647 following coagulation induction.In contrast to pre-labeled fibrinogen,FFBP also stains already formed fibrin networks.By combining FFBP with real-time live confocal microscopy even the visualization of single fibrin fibers is possible.Conclusions:These data indicate that FFBP is a valid and valuable tool for real-time live confocal assessment of clot formation.Relevance for patients:Our findings present a valuable alternative for the visualization of fibrin even after its formation,and we believe this approach will be particularly valuable for future investigations of important,but previously overlooked,aspects of clot formation. | Nikolaj Weiss Bettina Schenk Mirjam Bachler Cristina Solomon Dietmar Fries Martin Hermann | 2017 | Journal of Clinical & Translational Research2017，3，2： | 1 |
| 14 | Biologic Width around one- and two-piece titanium implants 显示文摘 | Hermann JS Buser D Schenk RK | 2001 | Clin Oral Implants Res2001，12，： | 1 |
| 15 | The push-pull principle:an electrostatic actuator concept for low distortion acoustic transducers显示文摘Electrostatic actuators are of particular interest for microsystems(MEMS),and in particular for MEMS audio transducers for use in advanced true wireless applications.They are attractive because of their typically low electrical capacitance and because they can be fabricated from materials that are compatible with standard complementary metal-oxide semiconductor(CMOS)technology.For high audio performance and in particular low harmonic distortion(THD)the implementation of the push-pull principle provides strong benefits.With an arrangement of three electrodes in a conjunct moving configuration on a beam,we demonstrate here for the first time a balanced bending actuator incarnating the push-pull principle operating at low voltages.Our first design already exhibits a harmonic distortion as low as 1.2%at 79 dB using a signal voltage of only 6 V_(p) and a constant voltage of only±10 V_(dc) in a standard acoustic measurement setup.Thus,exceeding our previously reported approach in all three key performance indications at the same time.We expect that our novel electrode configurations will stimulate innovative electrostatic actuator developments for a broad range of applications.In this paper we report the basic theory,the fabrication and the performance of our novel actuator design acting as an audio transducer. | Bert Kaiser Hermann A.G.Schenk Lutz Ehrig Franziska Wall Jorge M.Monsalve Sergiu Langa Michael Stolz Anton Melnikov Holger Conrad David Schuffenhauer Harald Schenk | 2022 | Microsystems & Nanoengineering2022，8，6： | 0 |
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