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15篇 您的检索式：作者名="LI BINCHENG"

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		题名	作者	年代	出处	被引量
	1	Optical and photo-carrier characterization of ultra-shallow junctions in silicon显示文摘Spectroscopic ellipsometry (SE), photocarrier radiometry (PCR) and photoluminescence (PL) techniques were employed to measure the ultra-shallow junction (USJ) wafers. These USJ wafers were prepared by As+ ion implantation at energies of 0.5-5 keV, at a dose of 1×1015 As+ /cm 2 and spike annealing. Experimentally the damaged layer of the as-implanted wafer and the recrystallization and activation of the post-annealed wafer were evaluated by SE in the spectral range from 0.27 to 20 m. The PCR amplitude decreased monotonically with the increasing implantation energy. The experimental results also showed that the PCR amplitudes of post-annealed USJ wafers were greatly enhanced, compared to the non-implanted and non-annealed substrate wafer. The PL measurements showed the enhanced PCR signals were attributed to the band-edge emissions of silicon. For explaining the PL enhancement, the electronic transport properties of USJ wafers were extracted via multi-wavelength PCR experiment and fitting. The fitted results showed the decreasing surface recombination velocity and the decreasing diffusion coefficient of the implanted layer contributed to the PCR signal enhancement with the decreasing implantation energy. SE, PCR and PL were proven to be non-destructive metrology tools for characterizing ultra-shallow junctions.	HUANG QiuPing LI BinCheng REN ShengDong	2013	Science China(Physics,Mechanics & Astronomy)2013，56，7：	2
	2	Simultaneous determination of optical loss, residual reflectance and transmittance of highly anti-reflective coatings with cavity ring down technique显示文摘	LI Bincheng CUI Hao HAN Yanling	2014	Optics Express(SI094-4087)2014，22，29：	1
	3	Complete Thermal Characterization of Film-on-Substrate System by Modulated Thermoreflectance Microscopy and Multi- parameter Fitting 显示文摘	LI Bincheng Pottier L Roger J P	1999	J Appl Phys1999，86，5：	1
	4	Photothermal detuning for absorption measurement of optical coatings 显示文摘	Hao Honggang Li Bincheng	2008	Appl Opt2008，47，2：	1
	5	Amperometric glucose biosensor based on sol -gel organic-inorganic hybrid material显示文摘	WANG Bingquan LI Bincheng DENG Qing	1998	Anal Chem1998，70，15：	1
	6	Sol - gel thin film immobilized soybean peroxidase biosensor for the amperometric delcrmination of hydrogen peroxide in acid medium显示文摘	WANG Bingquan LI Bincheng WANG Zhenxin	1999	Anal Chem1999，71，10：	1
	7	Repetition rate dependence of absorption of fused silica irradiated at 193 nm显示文摘	Weijing Liu Bincheng Li	2013	Chin Opt Lett2013，11，05：	1
	8	Photothermal detuning for absorption measurement of optical coatings 显示文摘	HAO HONGGANG LI BINCHENG	2008	Applied Opt2008，47，2：	1
	9	Pulsed top-hat beam thermal lens raeasurement on ultraviolet dielectric coatings显示文摘	Li Bincheng Martin S Welsch E	1999	Opt Lett1999，24，13：	1
	10	Pulsed photothermal deflection with top-hat beam excitation显示文摘	Li Bincheng Blaschke H Ristau D	2006	J Appl Phys2006，100，05：	1
	11	Probe-beam diffraction in a pulsed top-hat beam thermal lens with a mode-mismatched configuration显示文摘	Li Bincheng Welsch E	1999	Applied Optics1999，38，24：	1
	12	Pulsed laser induced mode-mismatched crossed-beam thermal lens measurements显示文摘	Li Bincheng Zhang S Y Fang J W	1997	Rev Sci Instrum1997，68，：	1
	13	Pulsed photothermal deflection with a top-hat beam excitation 显示文摘	Li Bincheng Blaschke H Ristau D	2006	Journal of Applied Physics2006，100，5：	1
	14	A New computation of Geometric Moments显示文摘	Li Bincheng	1993	Pattern Recognition1993，26，1：	1
	15	Thermal characterization of film-on-substrate systems with modulated thermoreflectance microscope 显示文摘	BINCHENG Li POTTIER L ROGER J P	2000	Review of scientific instruments2000，71，5：	1

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