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9篇 您的检索式:作者名="MALHAIRE C"
    题名 作者 年代 出处 被引量
1Design of a polysilicon-on-insulator pressure sensor with original polysilicon layout for,harsh environment显示文摘MALHAIRE C BARBIER D 2003Thin Solid Films2003,427,12:1
2Design of a polysilicon-on-insulator pres-sure sensor with original polysilicon layout for harsh environment显示文摘Malhaire C Barbier D 0,,:1
3PZT thin films integration for the realisation of a high sensitivity pressure microsensor based on a vibrating membrane显示文摘DEFAY E MILLON C MALHAIRE C 2002Sensors and Actuators A:Physical2002,99,12:1
4Design of a Polysilicon-on --insulator Pressure Sensor with Original Polysilicon Layout for Harsh Environment显示文摘Malhair C Barbier D 2003Thin Solid Films2003,427,12:1
5PZT thin films integration for the realization of a high sensitivity pressure microsensor based on a vibrating membrane显示文摘Delay E Millon C Malhaire C Barbier D 2002Sensors and Actuators A2002,,99:1
6Design of a Polysilicon on Insulator Pressure Sensor with Original Polysilicon Layout for Harsh Environment显示文摘Malhaire C Barbier D 2003Thin Solid Film2003,,:1
7Mechanical cross-characterization of sputtered inconel thin films for MEMS applications 显示文摘FLEURY G MALHAIRE C POPULAIRE C VERDIER M DEVOS A CHARVET P L POLIZZI J P 2007Sensors and Actuators B2007,126,1:1
8Control of the Ti diffusion in Pt/Ti bottom electrodes for the fabrication of PZT thin film transducers显示文摘Millon C Malhaire C Dubois C 2003Mater Sci in Semiconduct Proc2003,5,:1
9Ti and TiO,x Seeding Influence on the Orientation and Ferroelectric Properties of Sputtered PZT Thin Films显示文摘Millon C Malhaire C Barbier D 2004Sensors and Actuators2004,113,:1
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