| 1 | Structural Characterization of Laser Bonded Sapphire Wafers Using a Titanium Absorber Thin Film显示文摘Two sapphire substrates were tightly bonded by irradiation with a 1064 nm nanosecond laser and using a sputtered 50 nm-titanium thin film as an absorbing medium.Upon laser irradiation,aluminum from the upper substrate is incorporated into the thin film,forming Ti-Al-O compounds.While the irradiated region becomes transparent,the bond quality was evaluated by scanning acoustic microscopy. | A.de Pablos-Martín S.Tismer Th.Hche | 2015 | Journal of Materials Science & Technology2015，31，5： | 2 |
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