维普期刊资源整合服务平台（V6.5）

39篇 您的检索式：作者名="SARRO P M"

选中清除导出查看参考文献查看引证文献引用追踪共2页首页上一页第1页下一页末页 /2 跳转

	题名	作者	年代	出处	被引量
1	Silicon carbide as a new MEMS technology显示文摘		2002	Sensors and Actuators A2002，82，：	1
2	Intigratad circuit compatible design and technology of acoustic wave based microsensors 显示文摘	Vellekoop M J Lubking G W Sarro P M	1994	Sensor and Actuators A1994，44，：	1
3	Silicon threeaxial tactile sensor显示文摘	CHU Z SARRO P M MIDDELHOEK S	1996	Sensor and Actuators1996，54，：	1
4	Silicon carbide as a new MEMS technology显示文摘	Sarro P M	2000	Sens Actuat A2000，82，：	1
5	Self-adjustment of micro-mechatronics systems显示文摘	TICHEM M KARPUSCHEWSKI B SARRO P M	2003	Annals of the CIRP2003，52，1：	1
6	Measurement of Thermal Conductivity andDiffusivity of Single and Multilayer Membranes 显示文摘	Irace A Sarro P M	1999	Sensors andActuators A:Physical1999，76，13：	1
7	Low-stress PECVD SiC thin films for IC-compatible microstructures显示文摘	Sarro P M DeBoer C R	1998	Sensors and Actuators1998，67，：	1
8	Silicon three-axial tactile sensor显示文摘	CHU Z SARRO P M MIDDELHOEK S	1996	Sensor Actuator1996，54，：	1
9	Magnetic-Field Measurements Using an Integrated Resonant Magnetic-Field Sensor 显示文摘	K6dCr Z Bossche A Sarro P M	1998	Sensor and Actuators A1998，70，：	1
10	Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si显示文摘	D W de Lima Monteiro O Akhzar-Mehr P M Sarro	2003	Opitcal Express2003，11，18：	1
11	Silicon carbide as a new MEMS technology显示文摘		2000	Sensors and Actuators2000，82，：	1
12	Silieon carbide as a new MEMS technology显示文摘	SARRO P M	2000	Sensors Actuators2000，82，：	1
13	Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si显示文摘	Lima Monteiro D W Akhzar-Mehr O Sarro P M	2003	Optical Express2003，11，18：	1
14	Integrated vacuum sensor显示文摘	Sarro P M Meljer H C	1985	Sensors and Actuators1985，8，：	1
15	Silicon carbide as a new mems technology显示文摘	Sarro P M	2000	Sens Actuators A2000，82，13：	1
16	Application of electrostatic feedback to critical damping of an integrated silicon accelerometer显示文摘	Vankampen R P Vellekoop M Sarro P	1994	Sensor and Actuators1994，43，：	1
17	Thermal sensors based on theseebeck effect 显示文摘	van HERWAARDEN A W SARRO P M	1986	Sensors and Actuators1986，10，34：	1
18	Application of electrostatic feedback to critical damping of an integrated silicon capacitive accelerometer显示文摘	Kampen R P V Vellekoop M J Sarro P M	1994	Sensors an d Actuators A1994，，43：	1
19	Silicon Carbide as a New MEMS Technology 显示文摘	Sarro P M	2000	Sensors and Actuators2000，82，13：	1
20	Technology and applications of micromachined silicon adaptive mirrors 显示文摘	Vdocin G Middelhoek S Sarro P M	1997	Opt Eog1997，36，：	1

返回顶部每页显示：

共2页首页上一页第1页下一页末页 /2 跳转

互联网出版许可证新出网证(渝)字10号全国400电话 - 免长途话费

用户提示