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37篇 您的检索式：作者名="SHIKIDA"

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	题名	作者	年代	出处	被引量
1	Roughening of single-crystal silicon surface etched by KOH water solution显示文摘	Shikida Mitsuhiro Yamashiro Takashi	1999	Sensors and Actuators A1999，73，12：	1
2	Anisotropic etching rates of single crystal silicon of TMAH water solution as a function of crystallographic orientation显示文摘	Kazuo Sato Mitsuhiro Shikida Takashi Yamashiro	1999	Sensors and Actuators1999，73，：	1
3	Fabrication of a bub- ble-driven arrayed actuator for a tactile display显示文摘	Shikida M Imamura T Ukai S	2008	J Micro- mech Microeng2008，18，6：	1
4	Differences in anisotropic etching properties of KOH and TMAH solutions 显示文摘	Shikida M Sato K Tokoro K	2000	Sensors and Actuators2000，80，：	1
5	A MEMS flow sensor applied in a varia-ble-air-volume unit in a building air-conditioning system显示文摘	Shikida M Yamazaki Y	2013	Sensors and Actuators A:Physical2013，189，：	1
6	Non-photolithographic pattern transfer for fabricatingarrayed three-dimensional microstructures by chemical anisotropic etching 显示文摘	SHIKIDA M ODAGAKI M TODORKI N	2004	Sens Actuators A2004，116，：	1
7	Micromorphology of single crystalline silicon surfaces during anisotropic wet chemical etching in KOH and TMAH显示文摘	VEENENDAAL E V SATO K SHIKIDA M	2001	Sensors & Actuators A2001，93，3：	1
8	Tourism Relationship Model and Intermediary for Sustainable Tourism Management: Case Study of the Kiritappu Wetland Trust in Hamanaka, Hokkaido 显示文摘	Shikida A Yoda M Kino A	2010	Tourism and Hospitality Research2010，10，2：	1
9	Differences in anisotropic etching properties of KOH and TMAH solutions 显示文摘	Shikida M	2000	Sensors and Actuators2000，84，1：	1
10	Roughening of single-crystal silicon surface etched by KOH watersolution显示文摘	SATO K SHIKIDA M YAMASHIRO T	1999	Sensors and Actuators A1999，73，32：	1
11	Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH显示文摘	PAL P SATO K SHIKIDA M		0，，02：	1
12	Charac-terization of orientation dependent etching properties of singlecrystal silicon: effects of KOH concentration 显示文摘	SATO K SHIKIDA M MATSUSHIMA Y	1998	Sensorsand Actuators A1998，，：	1
13	Differences inanisotropic etching properties of KOH and TMAH 显示文摘	SHIKIDA M SATO K TOKOTO K	2000	Sen-sors and Actuators: A2000，80，2：	1
14	A MEMS flow sensor applied in a varia- ble-air-volume unit in a building air-conditioning system 显示文摘	Shikida M Yamazaki Y	2013	Sensors and Actuators A:Physical2013，189，：	1
15	Differences in anisotropic etching properties of KOH and TMAH solutions 显示文摘	Shikida M	2000	Sens Actuat2000，84，1：	1
16	Effect of magnesium in KOH solution on the anisotropic wet etching of silicon显示文摘	TANAKA H CHENG D SHIKIDA M SATO K	2007	Sensors and Actuators A : Physical2007，134，2：	1
17	Difference in anisotropic etching properties of KOH and TMAH solution显示文摘	Sato K Tokoro K Uchikawa D	2001	Sens Actuators A2001，3001，：	1
18	Fabrication of hollowneedle structure by dicing,wet etching, and metal deposition显示文摘	SHIKIDA M HASADA T SATO K	2006	Journal of Micromechanics and Microengineering2006，16，10：	1
19	Difference in anisotropic etching properties of KOH and TMAH solution显示文摘	Sato K Tokoro K Uchikawa D	2001	Sens Actuators A2001，19，：	1
20	Fabrication of an electrostatic microactuator with an S-shaped film显示文摘	Shikida M	1995	Sensors and Actuators1995，，3：	1

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